ClassOne™ Cleanroom Vibration Isolation Tables

Vibration-Free Work Station

• Pneumatic vibration-free mounts isolate up to 90% of building vibration, eliminate operator fatigue and nausea during microscope operations
• Low-profile, ergonomic design combines stability with convenience
• Built-in pneumatic controller simplifies leveling, allows continuous in-line operation
• Meets Class 100 particle requirements
• Bumper isolates front edge of bench and provides an arm rest
• All-304 stainless steel construction meets the critical cleanliness requirements

Manufacturers who routinely engage in high-magnification operations know there's more than one cause of motion sickness. Shaky work surfaces not only compromise precision and accuracy—they also literally make you sick!

As geometries get smaller and assembly and test procedures become more dependent on high magnifications, it becomes more important than ever before to ensure the optimal work surface for every application. That can mean not only effective vibration isolation, but also Class 1 cleanliness, static-dissipation, automated conveyance systems, and a host of other critical operating conditions. Failure to meet any one of these requirements can lead to microscopic errors—and big problems.

A Modular Vibration-Free Surface For Every Requirement

Terra Universal's Vibration-Free Work Station provides the optimal solution to these problems. It incorporates an advanced vibration-control design to provide the ideal work station for high-precision microelectronic manufacturing and testing operations—such as substrate aligning and measuring, surface profiling, probing, and wire bonding. Because the work station isolates 90% of typical building vibration, it eliminates worker fatigue, headaches, and nausea that result from microscopic operations on a shaky surface.

Each work station consists of five basic components: the frame, benchtop, undertop, shock bumper, and the pneumatic vibration-absorbing mounts and regulation system.

Pneumatic Vibration-Absorbing Mounts

These built-in mounts are designed for applications that require exceptionally high vibration isolation, with a natural frequency down to 2-4 Hz. The vibration absorbing system offers high deflection and a horizontal-to-vertical stillness ratio of one-to-one. This ensures excellent stability without lateral restraints; the system isolates up to 90% of most building vibrations.

By varying the air input supplied to the pneumatic mounts while a load is applied, the floating work surface can be adjusted in height for leveling within ± .25" (6 mm). Since pneumatic mounts operate at zero deflection under load, this work station requires 30% to 60% less free height than conventional benchtops. For most applications, the air pressure in the center body provides a significant portion of the isolation capabilities of the mounts.

In-house air, bottled air, or nitrogen can be used for pressurization of the mounts. The station includes a safety master regulator and an individual pressure regulator and gauge for each vibration isolator to allow easy inflation and balancing of the benchtop. This inflation system also allows you to operate the table while it is continuously connected to the gas supply; this in-line operation is recommended to ensure a steady, balanced work surface.

Each isolator is rated for a 25-100 pound (11.3 kg - 45.4 kg) load, so you can safely operate a standard station with up to 350 pounds (159 mm) of net load (with weight plates removed). For very light loads, under 25 pounds (11.3 kg.), it is recommended that the table be operated with one or more plate weights. Varying weights produce varying vibration-isolation results, depending on the frequency of vibrations in your facility; for best results, experiment with varying plate weight configurations. Weights are included with each station.

Frame and Bench Top

A thick-gauge steel plate provides optimum reinforcement and prevents sagging under heavy loads. This undertop is encased in the recessed underside of the benchtop and fastened to it, forming a two-piece floating work station. It is securely set on four to six vibration-free mounts, isolating the work surface from any possible shocks or vibrations. The undertop also comes with fasteners that allow one or two 40-lb. (18 kg.) weight plates to be added to the bench.

The frame is fabricated of all-welded 2" (51 mm) square 304 stainless steel tubing with 12-gauge thickness. The sturdy welded construction eliminates the need for leg bracing below the top frame, and the heavy-wall tubing allows the bench top to support much heavier loads than conventional benches without sagging.

The legs are fabricated of heavy-gauge 2" (51 mm) and 1.75" (44 mm) square tubing. Telescopoing design allows height adjustment. Benches include plastic, nonmarking glides and are available with the ErgoHeight™ option for motorized height adjustment.

The stainless steel benchtop combines chemical resistance and complete static conductivity. Each of these stations can accommodate virtually any load without sagging, and their ergonomic, low-profile design affords all of the comfort and convenience of standard benches.

A thick-gauge steel plate provides optimum reinforcement and prevents sagging under heavy loads. This undertop is encased in the recessed underside of the benchtop and fastened to it, forming a two-piece floating work station. It is securely set on four to six vibration-free mounts, isolating the work surface from any possible shocks or vibrations. The undertop also comes with fasteners that allow one or two 40-lb. (18 kg.) weight plates to be added to the bench.